2/1/2010	12:22:25 PM	Bypass valve closed
2/1/2010	12:22:26 PM	Main Vac valve closed
2/1/2010	12:22:35 PM	Main Vac valve opened
2/1/2010	12:22:36 PM	Bypass valve opened
2/1/2010	12:23:20 PM	Helium valve opened
2/1/2010	12:24:31 PM	SiCl4 pre valve opened
2/1/2010	12:25:00 PM	SiCl4 pre valve closed
2/1/2010	12:25:04 PM	Helium valve closed
2/1/2010	12:33:36 PM	Bypass valve closed
2/1/2010	12:33:37 PM	Main Vac valve closed
2/1/2010	12:33:43 PM	Bypass solenoid MFC set to  760.000000
2/1/2010	12:33:43 PM	Bypass valve opened
2/1/2010	12:33:50 PM	Helium valve opened
2/1/2010	12:34:14 PM	Bypass valve closed
2/1/2010	12:34:19 PM	Bypass valve opened
2/1/2010	12:34:20 PM	Bypass valve closed
2/1/2010	12:34:30 PM	Bypass valve opened
2/1/2010	12:34:31 PM	Bypass valve closed
2/1/2010	12:34:38 PM	Bypass valve opened
2/1/2010	12:34:39 PM	Bypass valve closed
2/1/2010	12:34:43 PM	Bypass valve opened
2/1/2010	12:34:53 PM	Bypass valve closed
2/1/2010	12:35:54 PM	Helium valve closed
2/1/2010	12:39:31 PM	Bypass valve opened
2/1/2010	12:39:32 PM	Bypass valve closed
2/1/2010	12:39:35 PM	Bypass valve opened
2/1/2010	12:39:37 PM	Bypass valve closed
2/1/2010	12:39:38 PM	Bypass valve opened
2/1/2010	12:39:46 PM	Bypass valve closed
2/1/2010	12:39:52 PM	Bypass valve opened
2/1/2010	12:40:09 PM	Bypass valve closed
2/1/2010	12:40:12 PM	Bypass valve opened
2/1/2010	12:40:14 PM	Main Vac valve opened
2/1/2010	12:41:09 PM	Bypass valve closed
2/1/2010	12:41:09 PM	Main Vac valve closed
2/1/2010	12:41:15 PM	Main Vac valve opened
2/1/2010	12:42:52 PM	SiCl4 pre valve opened
2/1/2010	12:43:15 PM	Bypass valve opened
2/1/2010	12:43:18 PM	Main Vac valve closed
2/1/2010	12:45:37 PM	Main Vac valve opened
2/1/2010	12:46:33 PM	Main Vac valve closed
2/1/2010	12:52:33 PM	Main Vac valve opened
2/1/2010	12:55:20 PM	SiCl4 pre valve closed
2/1/2010	1:06:37 PM	SiCl4 pre valve opened
2/1/2010	1:07:13 PM	SiCl4 pre valve closed
2/1/2010	1:07:26 PM	Error setting the  SiCl4 MFC to 50.000000
2/1/2010	1:07:30 PM	SiCl4 pre valve opened
2/1/2010	1:07:39 PM	Error setting the  SiCl4 MFC to 50.000000
2/1/2010	1:07:49 PM	Error setting the  SiCl4 MFC to 100.000000
2/1/2010	1:07:57 PM	Error setting the  SiCl4 MFC to 500.000000
2/1/2010	1:08:04 PM	Error setting the  SiCl4 MFC to 325.000000
2/1/2010	1:08:08 PM	SiCl4 pre valve closed
2/1/2010	1:08:09 PM	SiCl4 pre valve opened
2/1/2010	1:08:09 PM	SiCl4 pre valve closed
2/1/2010	1:08:10 PM	SiCl4 pre valve opened
2/1/2010	1:08:11 PM	SiCl4 pre valve closed
2/1/2010	1:08:11 PM	SiCl4 pre valve opened
2/1/2010	1:08:12 PM	SiCl4 pre valve closed
2/1/2010	1:10:34 PM	SiCl4 pre valve opened
2/1/2010	1:10:41 PM	SiCl4 pre valve closed
2/1/2010	1:10:42 PM	SiCl4 pre valve opened
2/1/2010	1:10:42 PM	SiCl4 pre valve closed
2/1/2010	1:10:47 PM	Error setting the  SiCl4 MFC to 100.000000
2/1/2010	1:10:52 PM	SiCl4 pre valve opened
2/1/2010	1:10:52 PM	SiCl4 pre valve closed
2/1/2010	1:11:21 PM	Error setting the  SiCl4 MFC to 200.000000
2/1/2010	1:11:59 PM	Error setting the  SiCl4 MFC to 100.000000
2/1/2010	1:12:27 PM	Error setting the  SiCl4 MFC to 325.000000
2/1/2010	1:15:02 PM	Program started after a nonstandard shutdown
2/1/2010	1:15:07 PM	Error setting the  SiCl4 MFC to 50.000000
2/1/2010	1:15:11 PM	Bypass valve opened
2/1/2010	1:15:11 PM	Main Vac valve opened
2/1/2010	1:16:32 PM	Error setting the  SiCl4 MFC to 100.000000
2/1/2010	1:16:49 PM	Program exited cleanly
2/1/2010	1:20:08 PM	Program started normally
2/1/2010	1:20:10 PM	Bypass valve opened
2/1/2010	1:20:11 PM	Main Vac valve opened
2/1/2010	1:20:11 PM	Main Vac valve closed
2/1/2010	1:20:12 PM	Main Vac valve opened
2/1/2010	1:20:13 PM	Bypass valve closed
2/1/2010	1:20:13 PM	Bypass valve opened
2/1/2010	1:20:21 PM	SiCl4 MFC set to  50.000000
2/1/2010	1:20:28 PM	SiCl4 pre valve opened
2/1/2010	1:21:05 PM	SiCl4 MFC set to  100.000000
2/1/2010	1:21:11 PM	SiCl4 pre valve closed
2/1/2010	1:21:18 PM	SiCl4 pre valve opened
2/1/2010	1:21:29 PM	SiCl4 pre valve closed
2/1/2010	1:27:07 PM	SiCl4 pre valve opened
2/1/2010	1:28:21 PM	SiCl4 MFC set to  325.000000
2/1/2010	1:30:22 PM	SiCl4 MFC set to  100.000000
2/1/2010	1:31:11 PM	SiCl4 pre valve closed
2/1/2010	1:35:48 PM	SiCl4 pre valve opened
2/1/2010	1:35:50 PM	SiCl4 pre valve closed
2/1/2010	1:35:52 PM	SiCl4 pre valve opened
2/1/2010	1:36:24 PM	SiCl4 MFC set to  325.000000
2/1/2010	1:36:53 PM	SiCl4 pre valve closed
2/1/2010	2:29:24 PM	SiCl4 pre valve opened
2/1/2010	2:30:33 PM	SiCl4 MFC set to  100.000000
2/1/2010	2:30:49 PM	SiCl4 MFC set to  325.000000
2/1/2010	2:31:07 PM	SiCl4 pre valve closed
2/1/2010	2:42:23 PM	SiCl4 pre valve opened
2/1/2010	2:45:43 PM	SiCl4 pre valve closed
2/1/2010	2:45:59 PM	SiCl4 MFC set to  100.000000
2/1/2010	2:46:07 PM	SiCl4 pre valve opened
2/1/2010	2:47:22 PM	SiCl4 MFC set to  325.000000
2/1/2010	2:47:43 PM	SiCl4 pre valve closed
